| 摘要 |
PURPOSE:To facilitate handling of boat and accelerate automatic operation by restoring the boat fixing mechanism and providing a mechanism which makes it impossible to remove the boat receptacle from the shelf body and a driving source for driving said mechanism itself. CONSTITUTION:A boat receptacle body 11 allows the mounting of boat 1 which houses a semiconductor substrate 2. A shelf itself 12 allows the mounting of a receptacle 11. The fixing mechanism of boat 1 is composed of a fixed block 13, a pin 5, a transfer block 14, a slide shaft and a compressive spring 18. A plate spring 19 is fixed to the body 12, pulling the pin 15 to the inside of body 11 through a cam-follower 31 and releasing the fixed mechanism. A block 22 is rotatably secured through the shaft 23 and is given a force to move upward in the side of stopper 21 by a tensile spring 20. A cylinder 26 pushes a bearing 30 attached to the block 14 through a pushing plate 28, thereby resetting a fixing mechanism. |
