| 摘要 |
PURPOSE:To carry out vacuum exhaustion automatically while maintaining the pressure of an ion pump itself at a constant level by subjecting the exhaust part to rough exhaustion, being followed by minutely switching the valve of the ion pump by means of a signal sent from a signal producing circuit. CONSTITUTION:The exhaust part 1 of an Auger electron spectral analyser containing an electron gun, an ion source and a sample, is repeatedly subjected to rough exhaustion by means of sorption pumps 2 and 3. Next, after a vacuum degree of below 10<-3> Torr is achieved, exhaustion is carried out by driving an ion pump 7 whule minutely controlling a control valve 23 by means of a control device 22 during the time when the indication of the vacuum gage of a signal generating circuit 21 is below a preset value. When the indication of the vacuum gage exceeds the preset value, the signal is stopped and the control valve 23 is closed so as to maintain the vacuum degree at below 10<-5> Torr. Such operation as above is carried out repeatedly. As a result, main exhaustion can be automatically carried out with the ion pump 7 without causing any breakdowns, and the operational performance can be enhanced. |
