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发明名称
摘要
申请公布号
JPS5952625(U)
申请公布日期
1984.04.06
申请号
JP19820147881U
申请日期
1982.09.29
申请人
发明人
分类号
H01J37/317;H01L21/265;H01L21/68;H01L21/683;(IPC1-7):H01L21/265
主分类号
H01J37/317
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