| 摘要 |
PURPOSE:To measure the slant angle of a structure and the like, by providing containing tubes having a specified length for a sealing liquid, whose specific gravity is known, in the slant direction of a substrate to be measured, and measuring the differential pressure at the central part by a differential pressure transmitting device. CONSTITUTION:Capillary tubes 2 and 3 are connected to the high pressure side and the low pressure side of a diaphragm type differential pressure transmitting device 1. Containers 4 and 5 having diaphragms are connected to the tips of the tubes. The containers are filled with a sealing liquid 6 in a hermetically sealed manner. The parts wherein the sealing liquid 6 is contained are fixed to a substrate 7 in a straight line. The specific gravity of the sealing liquid 6 is made to be gamma, the distance between the containers 4 and 5 with diaphragms is made to be l, and the height is made to be (h). Then the differential pressure h.gamma is detected, and a slant angle theta is measured. When the substrate 7 is horizontal, the differential pressure detected by the differential pressure transmitting device 1 is zero. These members are coated by a cover 8 so as to reduce the effect of the change in ambient temperature, and the measuring accuracy is improved. |
