| 摘要 |
PURPOSE:To measure objectively and to display an output signal from an object to be measurement by comparing a voltage value as waveform data on a moni tor scope with a reference voltage value. CONSTITUTION:A device body 21 is provided with a terminal 27 for an X-axis output as a horizontal output and an output terminal 28 for a Y-axis output as a vertical output. The signal of the Z-axis output from the terminal 27 is sent to an X-axis comparator 29, which compares an optional preset reference voltage V1 with the signal of the X-axis output. When the both becomes equal to each other, the comparator 29 outputs it to turn on a switch 30. The Y-axis output is inputted to a Y-axis comparator 31 for the first time when a switch 30 is turned on. Then, optional reference voltages V2 and V3 are set previously as well as the comparator 29 and those voltage values are compared with the Y-axis output by the comparator 31. Thus, the comparator 31 checks characteristics of the waveform of a substrate to be measured 16 and the result are displayed on respective display parts 32-34 in an easy-to-decide state.
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