摘要 |
A series of staggered metal contacts, 44a-44d, 50a-50d is used to join adjacent ends of adjacent sets of substantially parallel semiconductor lines 32a-32d, 42a-42d, 52a-52d. The lines of one set can have a conductivity type opposite that of the lines of the adjacent set. Also, one of the sets may comprise epitaxial silicon, grown on an insulating substrate such as sapphire, while the other set comprises polycrystalline silicon. In a ROM the lines belong respectively to a memory array 12, a word predecoder 18 and a word line deselector 17. Word line extensions 42a-42d of P + type epitaxial Si are connected to word lines 32a-32d of N + polycrystalline Si and these are connected to word line extensions 52a-52d of P + epitaxial Si. <IMAGE> |