SEMICONDUCTOR DEVICE COMPRISING A NUMBER OF SERIES-ARRANGED DIODES AND METHOD OF MANUFACTURING SAME

摘要

PHF.79.582 A semiconductor device having a number of series arranged Schottky diodes or p-n diodes on one semiconductor plate. The diodes are provided on a semiconductor layer of a conductivity type which is present on a more highly doped layer of the same type, which is situated on a substrate which preferably consists of an insulating or semi-insulating material. The diodes are separated by grooves extending into the substrate and are arranged in series via a metal strip bridging the groove and a conductive column extending into the highly doped layer and preferably consisting of a metal. The invention also relates to a method in which the metal bridge and the column are etchant-resistant via a minimum number of masking steps.