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发明名称
METHOD FOR PULLING UP SINGLE CRYSTAL
摘要
申请公布号
JPS5957986(A)
申请公布日期
1984.04.03
申请号
JP19820167423
申请日期
1982.09.24
申请人
SUMITOMO DENKI KOGYO KK
发明人
KOTANI TOSHIHIRO
分类号
C30B15/14;C30B15/20;C30B15/22;C30B15/36;C30B27/02;C30B29/40;H01L21/02;H01L21/208
主分类号
C30B15/14
代理机构
代理人
主权项
地址
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