| 摘要 |
PURPOSE:To form a stable compd. film without heating an object to be treated to a high temp., by ionizing an evaporating material with a filament or an ionization electrode and ionizing a gas for reaction with a thermion filament and a thermion electrode. CONSTITUTION:The evaporated material 4 of a vapor source 3 is melted and evaporated and is ionized with an ionization electrode 5. On the other hand, a gas for reaction is admitted through a gas introducing port 6 into an evacuation chamber 1 to maintain the inside of said chamber below the reduced pressure. A thermion filament 9 is then heated to ionize the gas for reaction and the electrons generated with the ionization are absorbed in a thermion electrode 10. A negative voltage is impressed to an object 7 to be treated to apply coating on the object 7, whereby the compd. film free from defects such as cracking, peeling or the like is formed. The object 7 is heated to a relatively low temp. with a heater 8 or is not heated in this case. |
