| 摘要 |
PURPOSE:To provide excellent runnability without affecting a magnetic characteristic and to enable mass production by exposing a magnetic recording layer to a glow discharge atmosphere using a gaseous mixture of the gas of a silicon org. compd. and gaseous oxygen and forming a siliceous film on the magnetic recording layer. CONSTITUTION:Plural pinholes each sized about 1mm. diameter are provided to a discharge electrode 2 provided on the magnetic metal side of a magnetic recording medium 1 which is an object to be treated in such a way that org. gas scatters uniformly between the electrodes. A reactor 5 is evacuated to <=10<-3>Torr with a vacuum pump and the valves in a gas introducing port 4 and discharging port 6 are regulated to control the degree of vacuum. When gaseous oxygen is mixed through a gaseous oxygen introducing port 8 with the gaseous monomer introduced from a monomer vessel 7, the oxidation reaction of the gaseous monomer arises and the oxide of the inorg. material is formed with the mixing ratio of the gaseous monomer and the gaseous oxygen according to the conditions of glow discharge, more particularly the conditions of the impressed electric power to deposit uniformly in an ultrafine powder form. |
