| 摘要 |
PURPOSE:To provide a white light emitting thin-film EL element with high luminance, by using as a luminescent layer an amorphous hydrogenated silicon carbide (a-SixC1-x:H) film contg. oxygen as impurities. CONSTITUTION:A transparent conductive film 42 comprising In2O3.SnO2, etc., a thin-film luminescent layer 43 comprising a-SixC1-x:H contg. O of 0.05% or above relative to the total amt. of Si, C, and O, an insulating protective layer 44 comprising Y2O3, etc., and a back electrode 45 comprising Al, etc. are provided on a glass substrate 41 by means of electron beam deposition, etc. to form a thin- film luminescent element. The compsn. of the layer of a-SixC1-x:H is pref. about 0.2<=(Si/C)<=0.5. |
