GAS DISTRIBUTION SYSTEM FOR SPUTTERING CATHODES,申请号IL19830070458-传众专利搜索

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发明名称	GAS DISTRIBUTION SYSTEM FOR SPUTTERING CATHODES
摘要
申请公布号	IL70458(D0)	申请公布日期	1984.03.30
申请号	IL19830070458	申请日期	1983.12.15
申请人	SHATTERPROOF GLASS CORP	发明人
分类号	C23C;C23C14/54;(IPC1-7):C23C/	主分类号	C23C
代理机构		代理人
主权项
地址

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