发明名称 AUTOMATIC MCLEOD TYPE VACUUM GAGE
摘要 PURPOSE:To automate measurement and recording, by driving a rotary mechanism by motors, by measuring the height of mercury by a vertical moving mechanism wherein an optical sensor is used, and controlling them by a microcomputer. CONSTITUTION:An entire rotary frame 6 is rotated by a stepping motor 5. A beam switch 7 is quietly lowered downward from the upper part of a glass tube 1 by a vertical driving stepping motor 10. When the beam switch 7 reaches the highest point of the mercury, the output of the beam switch 7 is turned ON, and the descending is stopped at this time. The position is measured by a length measuring magnetic sensor built in a supporting post 9. Based on the relationship between the preset position in a table and the vacuum degree, the value is searched, and the vacuum degree is selected. The series of operation controls are performed by a microcomputer 12. The measured result is printed or plotted on a printer or X-Y plotter 13.
申请公布号 JPS5954935(A) 申请公布日期 1984.03.29
申请号 JP19820163913 申请日期 1982.09.22
申请人 HITACHI SEISAKUSHO KK 发明人 SASAKI MITSUO
分类号 G01L21/04;(IPC1-7):01L21/04 主分类号 G01L21/04
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