| 摘要 |
A capacitive pressure sensor includes at least one stationary substrate (300a, 300b) and a diaphragm (250) having a portion movable with respect to the substrate, a pressure chamber (205a, 205b) being defined between the diaphragm and the at least one substrate and filled with a fluid exposed to the pressure to be detected. The diaphragm (250) is formed of silicon as an electrically conductive material, thus serving as one electrode of the capacitive sensor. The substrate or substrates are formed of silicon, thus themselves forming the opposite electrode or electrodes of the capacitive sensor. Spacers of insulating material such as borosilicate glass, quartz, soft glass or sapphire, are bonded between the diaphragm and the substrate or substrates by an anodic bonding process. |
