| 摘要 |
PURPOSE:To enable to approach an element to a magnet by forming a thin ferromagnetic film on a film, and covering the film with it to package it, thereby enabling to inexpensively manufacture the element itself and reducing the thickness of the element. CONSTITUTION:A ferromagnetic material 6 such as permalloy is placed as a material for a magneto-resistance element in a vacuum container 5, and when an electron beam 7 is emitted thereto, the material 6 is molten to become ultrafine particles 8, which are flown. This is throttled in a suitable range by a shutter 9, and collided to a resin film 10 which is flexible and has relatively high heat resistant temperature, thereby forming a thin film of several hundreds to serveral thousands Angstrom thick. A detector 23 and rectangular pad 24 of folded pattern by thin ferromagnetic films are formed on the film 10 formed in a reduced thickness, a thin gold film 25 is formed on the pad 24, a film 26 is superposed on the pattern film, rolled by hot rolls, thereby obtaining a magneto-resistance element 31 which is completely packaged. |
