| 摘要 |
PURPOSE:To reduce the area of an MIM capacitor per unit volume by forming the MIM capacitor in a laminated layer. CONSTITUTION:An MIM capacitor of 2-layer laminated strcuture is composed of first-layer MIM capacitor which is interposed between an insulating film 3 an metal films 2, 4 and second-layer MIM capacitor which is interposed between an insulating film 4 and metal films 4, 7 so that the films 2, 7 are electrically connected to each other. The first-layer and second-layer MIM capacitors are connected in parallel with each other, and have double capacity as compared with the MIM capacitor of single layer structure. In other words, the same capacitance as the MIM of single layer structure can be performed with 1/2 area, and it is not necessary to add new element. Accordingly, the integrated circuit can be reduced, and high performance can be obtained. |
