发明名称 MIS field-effect devices
摘要 A description is given of an MIS field-effect device for high-frequency applications in which gate insulators having high permittivity and high breakdown strength are used, at least one of the materials silicon nitride (Si3N4) and/or aluminium oxide (Al2O3) being used to produce the gate insulator. MIS field-effect devices according to the invention are suitable for producing high-frequency amplifiers and mixers.
申请公布号 DE3235389(A1) 申请公布日期 1984.03.29
申请号 DE19823235389 申请日期 1982.09.24
申请人 SIEMENS AG 发明人 HOELTGE,HARALD,DIPL.-ING.;KAUSSEN,FRANZ,DIPL.-PHYS.;KEINER,FRITZ,DIPL.-PHYS.
分类号 H01L29/51;(IPC1-7):H01L29/78 主分类号 H01L29/51
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