| 摘要 |
PURPOSE:To detect hydrogen chloride gas easily, by heating SnO2-Sb2O3 semiconductor sensor to 120-150 deg.C. CONSTITUTION:A heater material, such as a tungsten wire or the like, is interposed between two ceramic plates, which are contact-bonded on heating by means of alumina cement or the like with lead wires 1 led out to form a substrate. Three signal leadout wires of Pt ae provided on the substrate. The central wire is used in common. Then, an SnO2-Sb2O3 semiconductor powder is applied on the whole surface of the substrate and is baked. A half of the semiconductor part is coated with a polyimide paint to form a temperature compensation part. The thus formed sensor element is heated to 120-150 deg.C to detect hydrogen chloride (HCl) gas. The sensor element has gas sensing characteristics that the resistance value thereof has a change on the order of about 1/10 with respect to hydrogen chloride gas of 5ppm and therefore can detect a very small amount of HCl gas. |
