| 摘要 |
PURPOSE:To prevent the deterioration of photoelectric transducing efficiency due to light projection, by adding a slight amount of B in an amorphous (i) layer on a (p) layer of amorphous SixC1-x. CONSTITUTION:On a transparent electrode 2 on a glass plate 1, amorphous p type SixC1-x 3p is formed by glow discharge in 70% SiH4+30% CH4+0.3% B2H6. Then amorphous Si 3i is laminated from SiH4+3-0.5ppm B2H6, and amorphous Si 3n is deposited from SiH4+1% PH3. In this constitution, when a minute amount of B is added to the (i) layer, the deterioration of photoelectric transducing efficiency with respect to time of light projection can be made small. When the amount of B increases beyond a sepcified range, the initial value of the transducing efficiency is decreased, which is not desirable. |
