IMPROVED POSITIVE-WORKING RESIST MATERIALS AND THEIR USE IN A FORMATION OF A NEGATIVE RESIST PATTERN ON A SUBSTRATE

摘要

An improved positive-working resist material capable of forming on a substrate either a positive resist pattern or a negative resist pattern. The positive-working resist material comprises a positive-working resist resin having incorporated therein one or more photochromic compounds, such as spiropyrans, triphenylmethane dyes, anils and the like. A positive or negative resist pattern having a remarkably improved definition can be obtained. The use of such a positive-working resist material in the formation of a negative resist pattern on the substrate is also disclosed.