| 摘要 |
PURPOSE:To vary an effective deposition area and a maximum incident angle of a ferromagnetic material with simple structure by providing two guide rolls above a cylindrical rotary can and interposing an expander roll between the can and one guide roll, and performing preliminary vapor deposition besides primary vapor deposition. CONSTITUTION:The 1st cylindrical rotary can 24 and the 2nd cylindrical rotary can 26 are installed horizontally on a running path for a base material 20 between both the rolls 20 and 22, and the base material 20 runs in contact with the downward surface of each can. Plural rolls 28 for controlling and smoothing the run of the base material are arranged at specified positions. A stick preventive plate 42 is provided to prevent vapor of the material in a hearth from sticking to an unnecessary part indiscriminately. Further, a shield plate 44 for controlling a vapor flow is installed under the 2nd can 26. In a figure, 46 is the expander roll. The incident angle of the vapor to the 2nd can 26 is adjusted by this roll. Furthermore, the place where the preliminary vapor deposition is performed is specified. |
