| 摘要 |
PURPOSE:To obtain an apparatus for displaying a voltage contrast image under the condition that a protection film is covered through the use of a low speed energy as the primary beam by respectively providing specific deflection oscillator, a circuit for applying voltage to sample and a signal selection circuit. CONSTITUTION:A voltage is applied to the specified Al wiring of semiconductor of a sample 8. When the sample is irradiated with slowly accelerated primary beams 1, the secondary electrons are generated from the surface of sample 8. The secondary electron signal generated also includes an general SEM data and a voltage contrast data applied to the Al wiring. This signal is detected by a detector 5 and amplified and is then inputted to a signal selection circuit 6. When a rectangular wave is applied to the Al wiring, a signal having equal positive and negative values is generated as an output. The signal selection circuit 6 selects either one signal and performs switching by the synchronous signal of X-scanning sent from the deflection oscillator 4. An output is inputted as an intensity modulated signal of CRT 9 and is displayed on the CRT screen as an SEM image. |
