摘要 |
PURPOSE:To enable the high quality and efficiency machining of wafers by uprighting a carrier, lowering a feed arm and setting a plurality of wafers loosely among a pair of guide members, a bevel type grinding roller and a feed roller. CONSTITUTION:With a feed arm 5 positioned transversely, a carrier 7 stowing a plurality of wafers 6 is mounted, and the wafer 6 is retained with the grooves 7' of the carrier 7 and those of the feed arm 5. Then, the carrier 7 is made upright and the feed arm 5 is lowered for inserting a plurality of the wafers 6 in the deep divisional grooves of a pair of guide members 1 and 2 from the upper side, thereby setting the wafers 6 rather loosely on a bevel type grinding roller 3 and a feed roller 4 by the help of the own weight. And both guide members 1 and 2 fixed in an opposite direction and the wafers 5 kept approximately upright, the wafers 6 are turned with the rotation of the feed roller 4 and concurrently bevelled with the grinding roller 3. In this way, many wafers are automatically fed and high quality wafers can be bevelled at high frequency. |