| 摘要 |
PURPOSE:To obtain a small size and easily manufactured high speed positioning apparatus comprising an X-axis transfer member which is capable of sliding on the X axis on a base, a Y-axis guide means which is integrated to said X-axis transfer member and orthogonally crosses the X-axis and a sample table which is engaged with said guide means and is guided in the Y-axis direction. CONSTITUTION:A groove 2 is formed on a base 1 and an X-axis transfer member 3 having the T-shaped section slides this groove in the plane perpendicular to the X-axis direction. The parts 4-6 of the X-axis transfer member 3 which are in contact with the base 1 are attached with polymer sliding member. At the upper surface of X-axis transfer member 3, an Y-axis guide 9 is laid orthogonally crossing the X axis. A groove 11 is formed at the center of lower surface of a sample table 10 which moves in both directions of X and Y axes. This groove engages with the Y-axis guide 9 and guides this sample table 10 in the Y-axis direction. The sliding part 12 is attached with a sliding member and contactness with the Y-axis guide 9 is secured by a loading mechanism 13. The sliding legs 14 are formed at the four corners of sample table 10 and these are sliding on the upper surface of base 1 in both X and Y directions. |
