| 摘要 |
PURPOSE:To eliminate the displacement of a metal ball by bonding through the process that the metal ball is attracted by a pressure setting surface during a first bonding by forming a through hole to be bored to the pressure setting surface of bonding tool in such a structure as assuring vacuum attraction and inactive gas injection. CONSTITUTION:A fine hole 2 for supplying a fine metal lead is provided along the axis of pressure setting surface of a bonding tool 1 and is connected to an apparatus for vacuum attraction and inactive gas injection. After a metal ball 7 is formed by fire flame or ignitor to a metal fine lead 6 supplied from the through hole 2 formed to the pressure setting surface, it is vacuum attracted from the through hole and thereby a metal ball 7 is attracted by the pressure setting surface 5. After the bonding is carried out to the first connecting surface 8 under this condition, inactive gas is injected, a metal fine lead 6 is smoothly supplied dependant on the movement of bonding tool 1. Next, pressure setting and bonding are carried out to the second connecting surface 9 and a metal fine lead 6 is cut. |
