| 摘要 |
PURPOSE:To raise the cooling efficiency for a rotary disc by inserting a stainless sheet material between a stainless water cooling vessel through which cooling water passes and the aluminum rotary disc, and drilling plural small holes through the center of the rotary disc located behind the sheet material. CONSTITUTION:An aluminum rotary disc 3 is formed into a complete disc shape, and screwed down with a screw 12b by inserting an O ring 18 and a stainless sheet material 20 between said disc and the tray-shaped cover 4b of a stainless water cooling vessel 4. Further, plural small holes 19 are drilled through a portion behind the stainless sheet material 20 of the aluminum rotary disc 3. Hereby, heat stored in the aluminum rotary disc 3 is effectively transmitted through the stainless sheet material 20 to cooling water, enabling the restriction of temperature rise in the aluminum rotary disc 3, due to beam heating the relaxation of thermal influences on a wafer 2, and the striking improvement of cooling efficiency. |
