| 摘要 |
PURPOSE:To measure two-dimensional distributions of the amplitude and the speed of a vibrated object surface, by a method wherein an ultrasonic wave is converged to the surface of a vibrating object to irradiate the same while object vibration overlapped up in the reflected wave is subjected to demodulating detection or the return time of the reflected vwave is detected. CONSTITUTION:When an RF electric signal is applied to a piezoelectric film 10 from an RF oscillator 100 through a circulator 110, an RF plane wave is emitted into a crystal 20 such as sapphire and converged onto a specimen 50 by a positive lens constituted by the crystal 20 and water 40 at the spherical interface 30. The specimen 50 comprises a piezoelectric vibration plate such as PZT and is adhered to a metal stage 60. When a sine wave is applied from an oscillator 140, thickness vibration in a Z-direction is performed and an incident ultrasonic wave is modulated. The reflected wave thereof is detected through the circulator 110 by a receiver 120. By moving the stage 60 to directions (x), (y) by a machine translation system 130 to record a demodulated Z-signal, the two-dimentional distributions of the amplitude and the speed of the specimen 50 are measured. |
