| 摘要 |
PURPOSE:To avert creasing of a film by the effect of radiation heat in a device wherein a sputtering gun is disposed so as to face to a cylindrical can which rotates in contact with a polymer film, by disposing said gun on the film feed side. CONSTITUTION:The polymer film 12 delivered from a feed roll 14 is wound on a can 11, is fed at a specified speed by the rotation of the can 11 at a specified speed and is taken up on a tank-up roll 15. The film 12 in this stages faces to the can 11 and passes above a sputtering gun 13 provided on the roll 14 side, whereby a metallic film is continuously formed. The film 12 is wound long on the can 11 even after the formation of said metallic film and therefore even if the film 12 is elongated lngitudinally and transversely by the radiation heat of the gun 13, the tension on the roll 15 is averaged and is applied on the film 12. The creasing of the film 12 is thus obviated. |
