| 摘要 |
PURPOSE:To prevent a personal erroneous operation from occurring while improving reliability by a method wherein, whenever a carrier is moved between a semiconductor production device and a carrier transmitter, the lot identification code data of semiconductor containined in a carrier are automatically transmitted. CONSTITUTION:The data transmission system is composed of a central computer 1 for system control, a carrier input device 3 controlled by the computer 1, the multiple wafer processing devices 4 corresponding to each processing process of semiconductor wafer and a data transmission channel 6 between the devices 3, 4 and a carrier output device 5. A carrier transmitter 2 initially connected to the carrier input device 3 is selectively connected to each device 3, 4, 5 forming another data transmission channel 7. A supplying lot identification code input device 8 may input a lot identification code allotted for the carrier concerned whenever a new lot is closed. |
