| 发明名称 |
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| 摘要 |
A precise feeding table apparatus which comprises an XY-table assembly including a Y-table and an X-table mounted thereon. Electric motors for supplying a driving force to feed the X- and Y-tables are set on a base of the table apparatus. A driving shaft of the electric motor for the Y-table takes the form of a ball screw to cause a guide carriage supported by the driving shaft to make a minute reciprocation. A moment derived from the reciprocation of the guide carraige is not directly transmitted to the Y-table. A connection rod moving jointly with the guide carriage is connected to an output shaft fitted to the Y-table by means of a coupling including a fluid bearing. The fluid bearing supports the connecting rod in contactless relationship, thereby preventing the vibrations and moments of the connecting rod from being transmitted to the output shaft. |
| 申请公布号 |
JPS5912419(B2) |
申请公布日期 |
1984.03.23 |
| 申请号 |
JP19760150355 |
申请日期 |
1976.12.16 |
| 申请人 |
TOKYO SHIBAURA ELECTRIC CO |
发明人 |
MORIWAKI SACHIOSA;KAMYA KYOSHI;UEDA KATSUNOBU;TERAJIMA SEIJI;AIKAWA TETSUO;TSUKADA TAMEYASU;OOSHIO KOSUKE |
| 分类号 |
H01J37/20;B23Q1/00;B23Q1/26;B23Q1/38;B23Q1/62;B23Q5/40;B23Q11/00;F16C29/02;F16C32/06 |
主分类号 |
H01J37/20 |
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