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发明名称
VERFAHREN UND VORRICHTUNG ZUM VERARBEITEN VON EINZELNEN INTEGRIERTEN SCHALTKREISEN ZU FILMMONTIERTEN INTEGRIERTEN SCHALTKREISEN (MIKROPACKS)
摘要
申请公布号
DE3234744(A1)
申请公布日期
1984.03.22
申请号
DE19823234744
申请日期
1982.09.20
申请人
SIEMENS AG
发明人
FRITZ,OTMAR,DIPL.-ING.
分类号
H01L21/60;H01L21/68;(IPC1-7):01L21/92;01L21/68
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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