| 摘要 |
PURPOSE:To enable the mass production of a belt-like silicon crystal without deteriorating quality by installing a thermocouple for controlling a resistance heater with the forward end thereof held in contact with the side face of a capillary die. CONSTITUTION:This invention relates to a device of producing a belt-like silicon crystal 20 by disposing a crucible 12 contg. a silicon melt 11 and a capillary die 13 having a slit in a heating furnace having a resistance heater 17, bringing a seed crystal into contact with the melt 11 moved upward through a slit and pulling the crystal wherein a thermocouple 18 for controlling the heater 17 is installed with the forward end thereof held in contact with the side face of the die 13. The decrease in the liquid temp. in the state of charging directly a solid raw material from the outside of the furnace onto the crucible 12 is detected and the thermocouple 18 is disposed to take the time until the heat evolved by the heater is transmitted to the forward end of the die 13 upon feeding back the detected temp. decrease to the heater output into cnsideration, whereby the sticking of the belt-like crystal 20 is prevented and the change in the width thereof is suppressed as far as possible. |
