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经营范围
发明名称
CHEMICAL REACTOR
摘要
申请公布号
JPS5950095(A)
申请公布日期
1984.03.22
申请号
JP19820201221
申请日期
1982.11.18
申请人
EPITAKISHII EKUIPUMENTO INC
发明人
JIEEMUSU MAKUDAIAMITSUDO
分类号
C30B25/12;C30B25/02;H01L21/02
主分类号
C30B25/12
代理机构
代理人
主权项
地址
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