| 摘要 |
<p>PURPOSE:To adjust the flatness with specified precision easily by a method wherein a material to be processed is pressure-held by fixed reference pieces and vertically free movable reference pieces of a holder changing the level of movable pieces corresponding to the flatness of material to be processed. CONSTITUTION:A glass sheet 13 to be processed is contained in a recession 12 of a holder 11 while a spring 16 pushes up the glass sheet 13 pressure-welded by fixed reference pieces 14 and movable reference pieces 15 through the intermediary of a pusher plate 19 to be fixed. The movable pieces 15 are vertically driven by a piezoelectric motor 20. When light is emitted by a light emitting element 17 to be received by a light receiving element 18 by driving a base S, the position of reflected light entering into the light receiving element 18 above and below the glass sheet 13 is changed. When the changeable position is signal-processed to correct the travelling precision gamma of the base S, the flatness (distortion) of glass sheet 13 is measured. The piezomotor 20 is control-driven corresponding to the measured distortion to adjust both the level of movable pieces 15 and the flatness of glass sheet. Through these procedures, the material to be processed can be set up paying no careful attention to secure the flatness with specified precision.</p> |
