发明名称 FLUID MIXER AND THIN FILM DEVICE USING SAID MIXER
摘要 PURPOSE:To provide a fluid mixer adaptable for film formation, etc. which accomplishes thorough and uniform mixing by extending an introducing opening to the terminal end of a cylindrical mixing chamber on the outside circumference on the opening end side of said chamber, disposing an inside pipe in the mixing chamber, and removing a gaseous mixture from a discharging pipe connected to the inside pipe. CONSTITUTION:A conduit 33 is connected near the opening end of a cylindrical mixing chamber 31 so as to contact with the periphery of the chamber 31, and fluids A, B such as gas or the like are circumferentially blown. The fluids A, B flow at a high velocity in the narrow gap on the side wall between the chamber 31 and an inside pipe 34 concentrical therewith and flow downward while circumnutating. The mixing of the fluids A, B is accelerated by the vigorous motion thereof. The fluid mixture arriving at the terminal end of the chamber 31 changes sharply the direction of flow by 180 deg., passes the inside of the pipe 34 and is discharged from a discharging pipe 34' as shown by the arrow of a broken line to, for example, a film forming device.
申请公布号 JPS5949829(A) 申请公布日期 1984.03.22
申请号 JP19820159848 申请日期 1982.09.14
申请人 MATSUSHITA DENKI SANGYO KK 发明人 KUGIMIYA KOUICHI
分类号 C30B25/14;B01F5/00;B01F15/02;B01J12/02;H01L21/302;H01L21/3065;H01L21/31 主分类号 C30B25/14
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