NOZZLE FOR THE CONTINUOUS DEPOSITION OF A LAYER OF SOLID MATERIAL ON A SUBSTRATE

摘要

A nozzle for depositing a layer of solid material on a heated substrate, in particular by chemical vapor deposition, comprises three supply chambers for gas, which chambers communicate with three prismatic spaces which converge towards an outlet slot divided into three by two longitudinal strips which are tensioned at both ends and are applied against support surfaces which provide the strips with their respective inclinations centered on the truncated apex of a prismatic cavity which is divided by the strips to form the prismatic spaces. This arrangement enables a uniform spacing of the outlet slots of the spaces to be maintained whatever the length of the nozzle.