| 摘要 |
PURPOSE:To carry out microscopic inspection efficiently without causing electrostatic breakdown, by electrically short-circuiting a pattern with a nontransfer conductive film part on its outside through conductive wires. CONSTITUTION:The conductive film part 1 of the outer circumference of a mask substrate is electrically connected with the conductive film part 2 in its inside for use in transfer through the conductive wires 3 formed on the inside of the part 1, and all the parts 2 arranged along the wires 3 are connected through the wires 3. As a result, charge generated at each part 2 moves to the part 1, and accumulation of the charge and discharge breakdown can be prevented. Since the wires 3 can be used as a scanning coordinate axis at the time of microscopic inspection by arranging each of the wires 3 in parallel to each other at each row of the parts 3, the location of defect occurring at the parts 2 can be detected as a coordinate value, and the microscopic inspection can be carried out efficiently, too. |
