| 摘要 |
PURPOSE:To position a groove easily by additionally fitting a detector detecting the position of the groove set up to a quartz boat and moving a cradle supporting the quartz boat by a detecting signal from the detector when the semiconductor wafer is shifted to the quartz boat from a carrier or conversely to the carrier from the boat. CONSTITUTION:The cradle 1 is moved before and behind by using a ball screw 2 turned in both forward and reverse directions by a drive source. The quartz boat 4 with a plurality of the grooves 3 is placed on the cradle 1, and an ITV camera 5 detecting the positions of the grooves 3 is disposed positioned to an oblique upper section in the rectangular direction. The drive source for the screw 2 is controlled by an output from the camera 5, and the cradle 1 is moved. Consequently, the grooves 3 of the quartz boat 4 are detected accurately, and the fringe of the wafer 7 is inserted into the grooves by using an arm 6. Accordingly, the wafer is positioned positively in the grooves regardless of the alteration of the size of the boat. |
