| 发明名称 |
Solid state device with conductors having chain-shaped grain structure |
| 摘要 |
Aluminum electrically conducting patterns for integrated circuits are achieved with narrow lines and unexpectedly-high electromigration characteristics by making the crystal grains of the pattern into a chain-shaped structure with {111} orientation. A process for achieving the structure is also described.
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| 申请公布号 |
US4438450(A) |
申请公布日期 |
1984.03.20 |
| 申请号 |
US19810328149 |
申请日期 |
1981.12.07 |
| 申请人 |
BELL TELEPHONE LABORATORIES, INCORPORATED |
发明人 |
SHENG, TAN T.;SINHA, ASHOK K.;VAIDYA, SHEILA |
| 分类号 |
H01L21/3205;H01L23/532;(IPC1-7):H01L23/48;H01L29/44;H01L29/46;H01L29/62 |
主分类号 |
H01L21/3205 |
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