| 摘要 |
PURPOSE:To obtain a stable high precise oxygen sensor low in polarization resistance and having a fast operation speed, by doping the one surface side of an oxygen ion conductive plate comprising a tetravelent solid electrolyte with a pentavalent metal while the other surface side is doped with a trivalent metal. CONSTITUTION:Zilconia is doped with a small amount of a stabilizer to form an oxygen ion conductive plate and one surface side of said doped plate is doped with a pentavalent metal such as In to form an electron rich layer 2a while the other surface side thereof is doped with a trivalent metal such as Sb to form an electron rich layer 2b. An electrode 3 each comprising Pt are formed on both surfaces of the conductive plate 2 by vapor deposition and electromotive force between a pair of the electrodes 3, 3 is measured by lead wires 4. By this method, a stable high preciseness oxygen sensor 1 low in polarization resistance and having a fast operation speed is obtained. |
