| 摘要 |
PURPOSE:To eliminate the deterioration of solar batteries due to air and contrive to improve the thermal characteristic by containing a heat collecting plate and the solar batteries in high vacuous atmosphere by a method wherein the surface of a solar battery outside the heat collecting plate is coated with a protection film. CONSTITUTION:A plurality of amorphous solar batteries 26 are composed of back surface electrodes 21, amorphous films 23, clear electrodes 24, and collector electrodes 25, the collector electrode 25 of each solar battery 26 is connected to the back surface electrode 21 of the adjacent solar battery in one direction, and accordingly a plurality of the solar batteries 26 are connected in series. Each solar battery 26 is coated with the clear inorganic protection film 27 of SiO, SiO2, SiC, etc. The heat collecting plate 19 provided with the solar batteries on the upper surface is contained in the vacuum vessel, and the inside is once exhausted by vacuum to 10<-5>Torr; thereafter the inside of the vacuum vessel 28 is kept to 10<-2>Torr by passing Ar or He inert gas in, abnormal glow discharge is generated between both electrodes 29, thus sputtering a target 31, and the oxide protection films 27 are adhered over the entire surfaces of a plurality of the solar batteries 26 while the heat collecting plate 19 is transferred. |
