TIGHT SEAL STRUCTURE FOR ULTRAHIGH VACUUM

摘要

PURPOSE:To obtain the titled structure making sealing properties sure by providing plural lock plates press-sticking an annular gasket which is formed by covering an elastic core with a soft material to the annular gasket and providing both a projected shaft to one hand of the opposite flanges and a hole to the other hand thereof and nesting these. CONSTITUTION:An annular metallic gasket 1 consisting of an elastic core and a soft material covering it is arranged to a groove 3 formed in a flange 2. An aperture part is provided to the cover formed by the soft materials and one end of a lock plate 4 is inserted into this aperture. The other end is tightly stuck on the flange 2 by a lock screw 5 to closely stick the annular gasket 1 to the groove 3. A projected shaft 8 is formed on the flange 2 and nested in a hole 9 formed in an opposite flange 7. Therefore the transverse deviation of the flanges 2, 7 is not caused and the top surface of the annular metallic gasket 1 is not rubbed by the groove 3 foamed on the flange 7 and both flanges can be closely stuck.