Device for bringing about coincidence between the axis of a measuring probe and a normal to the surface of a part to be controlled

摘要

Device for bringing about the coincidence between the axis of a measuring probe and a normal to the surface of a part to be controlled and application to the measurement of thicknesses of thin layers. Thus, device (5) forms part of probe (4) on a measuring apparatus comprising means for positioning part (3) and which is constituted by at least one probe translating member (25) making it possible to vary its distance from the part, sensing means (53) integral with the probe for controlling the achievement of coincidence, means (43) for rotating about the axis Y'Y making it possible to give probe axis (A) a direction close to that of normal (N) and means for oscillating probe axis (A) about the said direction in order to achieve the coincidence.