| 摘要 |
PURPOSE:To simplify the operations for observing samples by storing the initial conditions of XY transfer mechanism, rotating mechanism and inclination mechanism as an electrical initial signal and then controlling the XY transfer mechanism on the basis of an alteration signal which indicates a change of rotating mechanism and the initial signal. CONSTITUTION:A sample 5 is irradiated with electron beam 6 and the irradiating position can be changed depending on a polarizing signal supplied to the deflection coils 7X, 7Y. A scanning signal sent from the scanning circuit 8 is supplied to the coils 7X, 7Y through the signal rotation circuit 9 and the magnification coefficient control means 10. An output of the circuit 8 is also supplied to the deflection coils 12X, 12Y of CRT11. As the brightness modulation signal of CRT11, an output of the detector 13 which detects the secondary electron signal of sample 5 is supplied through the amplifier 14. The inclination angle can be rotated as described below, with reference to the observation sight. Namely, a inclination axis variable observation mode signal is applied to the central control circuit 17 in order to storing the operating conditions of the XY transfer mechanism 3, rotating mechanism 4 and inclination mechanism 2 under the image displaying condition and thereafter the mechanism 4 is operated in order to rotate only the inclination angle. |
