| 摘要 |
PURPOSE:To obtain a photoreceptor having a desired concn. profile toward the outside surface and having high sensitivity, by generating convection in an alloy as a material to be evaporated stored in a boat and making the compsn. ratio of the alloy roughly uniform over the entire part of the material. CONSTITUTION:Heater lamps 10, 11 are respectively disposed above and below the material to be evaporated (for example, Se-Te of >=7wt% concn. of Te) 8 in a vapor source boat 13. The power of the upper heater 10 is made larger than the power of the lower heater 11 to make Rayleigh number >=2,500 and to generate agitation or convection in the vertical direction of the liquid. The depth of the liquid is made substantially deep in this stage. The gradual increase in the concn. of Te in the film to be deposited by evaporation on a substrate with an increase in the film thickness is generated from the agitation of the melt in the above-mentioned way. The photoreceptor having high sensitivity and less residual potential is obtd. by the above-mentioned method. |
