| 摘要 |
PURPOSE:To provide a titled vessel which enables accurate and quick temp. control with better responsiveness with temp. and permits easy vapor deposition operation, by providing an opening smaller than the evaporation area for heating and evaporating a material to be evaporated and increasing a radiation rate. CONSTITUTION:An upper opening 9 in a vacuum deposition device which heats and evaporates a material 3 to be evaporated in a vapor deposition boat 4 of a vapor source 1 by heaters 5, 6, and scatters the vapor through the opening 9 toward a substrate 2 to be deposited therein with a film by evaporation is constituted smaller than the evaporation area of the material 3 and an upper wall part 7 for storing the heaters in the boat 4 and a lower wall part 8 for storing the material 3 are constituted of a material having a high radiation rate such as thermally oxidized stainless steel or the like having >=0.8, more preferably >=0.9 radiation rate. It is equally preferable to improve the radiation rate of the parts 7, 8 by forming said parts of an ordinary material, mounting further a material layer having >=0.8 radiation rate in at least a part of the outside surfaces thereof or fixing radiation fins thereto. |
