发明名称 HIGH-FREQUENCY SEMICONDUCTOR SWITCHING DEVICE AND PROCESS FOR ITS MANUFACTURE
摘要 1. High-frequency semiconductor switching device constituted by a semiconductor wafer comprising alternating layers of conductivity type p and n, surface layers of type n of high doping level being flush at least with regions of each of the two faces of the wafer, at least one (7) of said layers of n type and of high doping level being superposed on a layer (2) of the same n type and of weaker doping level, the inner layers of the device enclosing atoms of bodies constituting recombination centres for electrical charges, characterized in that said layer (7) of type n of high doping level superposed on a layer (2) of the same type n of weaker doping level comprises a plurality of channels (29, 30) formed by extensions of the layer of type n with weaker doping level, and in that the ratio of the total surface of the plurality of channels to the surface of the region of high doping level lies between 5 and 10% in such a manner that the atoms of bodies forming the recombination centres for the electrical charges on their introduction can diffuse without obstruction towards said inner layers of the device.
申请公布号 DE3066336(D1) 申请公布日期 1984.03.08
申请号 DE19803066336 申请日期 1980.02.29
申请人 THOMSON-CSF 发明人 COLLUMEAU, YOLAND;LHORTE, ANDRE
分类号 H01L29/08;H01L29/167;H01L29/36;H01L29/74;(IPC1-7):H01L29/36;H01L29/16 主分类号 H01L29/08
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