发明名称 |
Apparatus and method of material removal with fluid flow within a slot. |
摘要 |
<p>Apparatus and method for cleaning material at the outer edge (200) of an object (158) by applying a fluid, which can be a solvent, for the material to a flat surface (198) adjacent the edge (200) by contact and moving the solvent onto the edge (200) by centrifugal force. A slot (160) is provided in a planar surface (162). The slot (160) is arcuate and elongated. The fluid (193) is directed along the slot (160) in the direction of rotation by a baffle (182). The slot (160) has a botton (171) sloping upward toward the planar surface (162) in the direction of rotation. A notch is provided between an edge of the planar surface (162) and the slot (160) to act as a spillway for excess solvent.</p> |
申请公布号 |
EP0102198(A2) |
申请公布日期 |
1984.03.07 |
申请号 |
EP19830304421 |
申请日期 |
1983.08.01 |
申请人 |
TEXAS INSTRUMENTS INCORPORATED |
发明人 |
KOTTMAN, RICKIE A.;TERRILL, ROBERT E.;WISE, ANN E.;ALLEVATO, TONY E.;TITUS, STEPHEN D. |
分类号 |
G03F7/16;G03F7/30;(IPC1-7):03F7/26 |
主分类号 |
G03F7/16 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|