发明名称 Apparatus and method of material removal with fluid flow within a slot.
摘要 <p>Apparatus and method for cleaning material at the outer edge (200) of an object (158) by applying a fluid, which can be a solvent, for the material to a flat surface (198) adjacent the edge (200) by contact and moving the solvent onto the edge (200) by centrifugal force. A slot (160) is provided in a planar surface (162). The slot (160) is arcuate and elongated. The fluid (193) is directed along the slot (160) in the direction of rotation by a baffle (182). The slot (160) has a botton (171) sloping upward toward the planar surface (162) in the direction of rotation. A notch is provided between an edge of the planar surface (162) and the slot (160) to act as a spillway for excess solvent.</p>
申请公布号 EP0102198(A2) 申请公布日期 1984.03.07
申请号 EP19830304421 申请日期 1983.08.01
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 KOTTMAN, RICKIE A.;TERRILL, ROBERT E.;WISE, ANN E.;ALLEVATO, TONY E.;TITUS, STEPHEN D.
分类号 G03F7/16;G03F7/30;(IPC1-7):03F7/26 主分类号 G03F7/16
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