Heterojunction transistor and method of fabricating the same.

摘要

Semiconductor device having a hetero junction in which a polycrystalline or amorphous silicon layer (7) doped with oxygen is formed over a monocrystalline silicon semiconductor substrate (1) as a passivation film, and impurities are doped only into the desired portions of the layer (7), thereby forming a semiconductor layer having a desired conductivity type. The photoetching step which is heretofore required can be omitted by forming the oxygen-doped polycrystalline or amorphous silicon layer (7) and then doping impurities having the desired conductive type.