| 摘要 |
PURPOSE:To obtain high vacuum by forming a high-polymeric thin film closely onto the surface of a turbine blade through plasma polymerization method and preventing gas from intruding into between the blade and the film. CONSTITUTION:An air intake port 7 of an air cooling type turbo molecular pump 1 is connected to an object apparatus, and a motor 2 is driven, and then the gas in the apparatus is discharged through the pump 1. The surface of a turbine blade possesses the superior resistance to chemicals, since the surface is coated and protected by a plasma-polymerized polymethacrolein film 11. Since said film 11 is formed from in close adhesion the corresponding monomer in the vacuum environment, there is no possibility for gas to invade into between the film 11 and the blade 10. Therefore, the high vacuum or super high vacuum in the equal degree to that with the turbine blade onto which surface processing is not applied can be obtained. |
